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Robust design of MEMS structures
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2011
Conference Paper
Title
Robust design of MEMS structures
Author(s)
Hofmann, K.
Billep, Detlef
Forke, Roman
Hiller, Karla
Geßner, Thomas
Mainwork
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
