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High Voltage Amplifier ASIC for High Capacitive Load MEMS based Piezoelectric Actuators
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2014
Conference Paper
Title
High Voltage Amplifier ASIC for High Capacitive Load MEMS based Piezoelectric Actuators
Author(s)
Köhler, D.
Seidel, R.
Helke, Christian
Hiller, Karla
Schüller, M.
Lipowski, Mathias
Mainwork
Smart Systems Integration 2014
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2014
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
