English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1996
Journal Article
Title
Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering
Author(s)
Zywitzki, O.
Hoetzsch, G.
Fietzke, F.
Goedicke, K.
Journal
Surface and coatings technology
DOI
10.1016/0257-8972(95)00270-7
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
