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A study of parylene C polymer deposition inside microscale gaps
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2006
Journal Article
Title
A study of parylene C polymer deposition inside microscale gaps
Author(s)
Ramachandran, A.
Koch, K.P.
Hoffmann, K.P.
Junk, M.
Journal
IEEE transactions on advanced packaging
DOI
10.1109/TADVP.2007.901662
Language
English
Fraunhofer-Institut für Biomedizinische Technik IBMT
