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  4. Reel-to-reel fabrication of integrated circuits based on soluble polymer semiconductor
 
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2005
Conference Paper
Title

Reel-to-reel fabrication of integrated circuits based on soluble polymer semiconductor

Abstract
Within this work a process for manufacturing integrated circuits based on solution processed polymer semiconductors has been developed. Basis is a reel-to-reel working photolithographic patterning process for metallized foils, which is used to fabricate the basic source-drain layer with high resolution. By two subsequent lacquering and three screen printing steps polymer field effect transistors are integrated to circuits.
Author(s)
Klink, G.
Hammerl, E.
Drost, A.
Hemmetzberger, D.
Bock, K.
Mainwork
Polytronic 2005, 5th International Conference on Polymers and Adhesives in Microelectronics and Photonics. Proceedings  
Conference
International Conference on Polymers and Adhesives in Microelectronics and Photonics (Polytronic) 2005  
DOI
10.1109/POLYTR.2005.1596477
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Keyword(s)
  • reel-to-reel manufacturing

  • organic electronic

  • polymer integrated circuit

  • low-cost electronic

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