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Comparison of lateral and vertical switches for application as microrelay
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1999
Journal Article
Title
Comparison of lateral and vertical switches for application as microrelay
Author(s)
Schiele, I.
Hillerich, B.
Journal
Journal of micromechanics and microengineering
DOI
10.1088/0960-1317/9/2/310
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
