Fraunhofer uses semiconductor process exhaust in fuel cell

Researchers at the Fraunhofer Institute for Integrated Systems and Device Technology IISB in Erlangen, Germany have developed a PEM fuel cell power generation system that converts hydrogen-rich exhaust gas from a semiconductor manufacturing facility into electrical energy. The new approach, developed within the framework of the Bavarian energy research project SEEDs, conserves resources and increases the overall efficiency of semiconductor production.