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Low-power micromachined structures for gas sensors with improved robustness
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2000
Conference Paper
Title
Low-power micromachined structures for gas sensors with improved robustness
Author(s)
Gracia, I.
Götz, A.
Plaza, J.A.
Cane, C.
Roetsch, P.
Fraunhofer-Institut für Physikalische Messtechnik IPM
Böttner, H.
Fraunhofer-Institut für Physikalische Messtechnik IPM
Seibert, K.
Fraunhofer-Institut für Physikalische Messtechnik IPM
Mainwork
Micromachined devices and components VI
Conference
Conference "Micromachined Devices and Components" 2000
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM
