Fabrication of FGS1/COB07 magnetic field sensors in the IMS

An integrated CMOS compatible fluxgate sensor system (FGS1), mounted in chip on board technology (COB) has been developed in the last years. It has been designed to measure magnetic fields in a range of ± 65 µT, which includes the range of the earth magnetic field (about 45 µT). Starting from the delivery of some demonstrator parts in the last years, now the market pull reaches an amount of more than 1000 pieces per year. It was necessary to qualify the system technology to achieve a pre series or series status. This required the development of a test procedure for the magnetic characterization of the system over the whole working range. Due to an expected further increase in the market pull the setup was designed to be capable for 10 000 and more parts per year. For an industrial corporation this is a small number, for a research institute this task requires optimized engineering due to the high costs of staff.