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  4. Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
 
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2010
Poster
Title

Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy

Title Supplement
Poster at MNE 2010, 36th International Conference on Micro and Nano Engineering, Genoa, Italy
Author(s)
Jambreck, J.D.
Yanev, V.
Schmitt, H.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Conference
International Conference on Micro and Nano Engineering (MNE) 2010  
File(s)
Download (1.17 MB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-367227
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • metal tip

  • nanoimprint lithography

  • scanning probe microscopy

  • FIB

  • TUNA

  • SCM

  • NIL

  • SPM

  • AFM

  • atomic force microscopy

  • scanning capacitance microscopy

  • focused ion beam

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