A miniaturized catalytic gas sensor for hydrogen detection containing a high porous catalytic layer formed by dry lift-off

This paper presents a miniaturized catalytic gas sensor for hydrogen detection, based on a sputtered high porous catalytic platinum layer, formed by dry lift off. It provides the possibility to structure these sensitive materials without using any chemicals or solvents. Due to the miniaturized device combined with this porous catalytic layer it is possible to reach a high sensitivity and a low response time [1], which offers other operating modes, e.g. alternating input signal modulation [2]. A new sensor design provides a better controlling of the catalytic temperature, which improves the stability of the catalytic structures. A sensitivity of about 1.8 mV /100 ppm is reached.