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Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
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1999
Conference Paper
Title
Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Author(s)
Szyszka, B.
Mainwork
High-performance coatings for transparent systems in large-area and/or high-volume applications. 2nd International Conference on Coatings on Glass, ICCG
Conference
International Conference on Coatings on Glass (ICCG) 1998
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST