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Automated in-situ interferometric form testing
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2008
Conference Paper
Title
Automated in-situ interferometric form testing
Author(s)
Schmitt, Robert
Fraunhofer-Institut für Produktionstechnologie IPT
Vielhaber, Karl
Fraunhofer-Institut für Produktionstechnologie IPT
Mainwork
ICPM 2008, International Conference on Precision Measurement. Proceedings
Conference
International Conference on Precision Measurement (ICPM) 2008
Language
English
Fraunhofer-Institut für Produktionstechnologie IPT
Keyword(s)
Optikprüfung
Interferometrie
interferometrische Formprüfung