High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting

This article reports on the performance and long-term stability of MEMS energy harvesters with wafer-level integrated micromagnets and aluminum scandium nitride (AlScN) as piezoelectric transducer layer. Broadband excitation via magnetic plucking is demonstrated with high power outputs of more than 85 μW RMS. Furthermore, no significant degradation of the performance was observed after 13 million excitation events by magnetic plucking.