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Surface modification by electron beams
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1983
Journal Article
Title
Surface modification by electron beams
Author(s)
Schiller, S.
Panzer, S.
Journal
Thin solid films
DOI
10.1016/0040-6090(84)90108-1
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
