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Hybrid assembly of micro scanner arrays with large aperture and their system integration
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2013
Conference Paper
Title
Hybrid assembly of micro scanner arrays with large aperture and their system integration
Author(s)
Sandner, Thilo
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Wildenhain, Michael
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Schwarzenberg, Markus
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Schenk, Harald
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
Smart Systems Integration 2013. CD-ROM
Project(s)
TACO
Funder
European Commission EC
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
