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  4. Surface contamination of silicon wafer after acidic texturisation
 
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2012
Conference Paper
Title

Surface contamination of silicon wafer after acidic texturisation

Abstract
The acidic texture bath that is commonly used in crystalline silicon solar cell manufacturing is a mixture of HF/HNO 3/H 2O [1]. While the influences of metal contamination on silicon wafer surfaces as well as several cleaning methods were intensively investigated in the previous 30 years [2] the effect of metal contaminations in texturisation baths has not yet been studied intensively. There are two categories of contaminations.
Author(s)
Oltersdorf, Antje
Moldovan, Anamaria  
Bayer, M.
Zimmer, Martin  
Rentsch, Jochen  
Mainwork
Ultra clean processing of semiconductor surfaces X  
Conference
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2010  
Open Access
File(s)
Download (315.45 KB)
DOI
10.4028/www.scientific.net/SSP.187.337
10.24406/publica-r-376039
Additional link
Full text
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
Keyword(s)
  • PV Produktionstechnologie und Qualitätssicherung

  • Silicium-Photovoltaik

  • Messtechnik und Produktionskontrolle

  • Produktionsanlagen und Prozessentwicklung

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