SMARTIEHS - A European project for parallel testing of M(O)EMS

2010

Conference Paper

Author(s)

Michael, S.

Gastinger, K.

Kujawinska, M.

Zeitner, U.

Albero, J.

Beer, S.

Moosburger, R.

Pizzi, M.

Mainwork

Smart systems integration 2010. 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM

Conference

European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2010