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Local deformation and stress analysis in the micro-nano interface regions
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2012
Conference Paper
Title
Local deformation and stress analysis in the micro-nano interface regions
Author(s)
Vogel, D.
Auerswald, E.
Dudek, Rainer
Auersperg, Jürgen
Rzepka, Sven
Michel, Bernd
Mainwork
36th International Microelectronics and Packaging Conference 2012. Proceedings. CD-ROM
Conference
International Microelectronics and Packaging Society, Poland Chapter (IMAPS Conference) 2012
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
