2007
Conference Proceeding
Title

Silicon Nitride, Silicon Dioxide and Emerging Dielectrics

Title Supplement
Proceedings of the Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films and Emerging Dielectrics, Part of the 211th Meeting of the Electrochemical Society, Chicago, Illinois, May 6-10, 2007
Person Involved
Sah, R.E.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Deen, M.J.
Zhang, J.F.
Yota, J.
Kamakura, Y.
Corporate Author
Electrochemical Society -ECS-, Dielectric Science and Technology Division
Publisher
Publishing Place
New Jersey
Conference
Language
English