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Reliability of micro- and nanosystems
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2003
Conference Paper
Title
Reliability of micro- and nanosystems
Author(s)
Michel, B.
Mainwork
MICRO.tec 2003: Applications - trends - visions. Proceedings
Conference
World Microtechnologies Congress (MICRO.tec) 2003
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM