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Implantation doping of germanium with Be, Mg, Zn und B-ions
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1983
Book Article
Title
Implantation doping of germanium with Be, Mg, Zn und B-ions
Author(s)
Metzger, M.
Zhang, Z.
Schmiedt, B.
Ryssel, H.
Mainwork
Ion implantation. Equipment and techniques
Language
English
IFT
Keyword(s)
Dotierung
implantation
integration
Ionenstrahl
