High-performnace Cr/Sc multilayers for the soft X-ray range

Results of soft x-ray reflection measurements of Cr/Sc multilayer mirrors dose to the Sc-L (? = 3.11 nm) and C-K (?=4.44 nm) absorption edges are presented. In particular, normal - incidence reflectivity measurements performed at BESSY II facility revealed a reflectivity of R = 17.3% @ 3.11 nm and 7.0 % @ 4.44 nm. Simulation results show that the interface roughness in the best Cr/Sc structures are less than 0.4 nm and strongly depend on the crystalline structure of the layers.