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Infrared study of the Si surfaces and buried interfaces
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1999
Journal Article
Title
Infrared study of the Si surfaces and buried interfaces
Author(s)
Milekhin, A.
Friedrich, M.
Wiemer, M.
Hiller, K.
Gessner, T.
Zahn, D.R.T.
Journal
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Conference
Conference on the Physics and Chemistry of Semiconductor Interfaces 1999
DOI
10.1116/1.590843
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
