2013
Conference Paper
Title

Post-deposition treatment of IBS coatings for UV applications

Abstract
IBS coatings were examined after deposition and after a defined annealing process. The optical and mechanical properties were improved significantly. The remaining coating stress can directly be controlled by selected process parameters.
Author(s)
Bischoff, M.
Nowitzki, T.
Voß, O.
Wilbrandt, S.
Stenzel, O.
Mainwork
Conference
DOI
Language
English