Composition and structure of plasma deposited a-C - H,F films

Amorphous carbon films (a-C:H,F) were prepared from fluorinated benzenes. The films were investigated by optical spectroscopy, by depth profiling with nuclear reactions and by electron energy-loss spectroscopy. Changes in the density and in the microstructure compared to a-C:H films may be explained by the different size of the H and F atoms.