A fast-tool-servo system based on electrodynamic and piezoelectric actuators

The increasing demand of structured ultra-precision parts leads to new technologies for the manufacturing of nonrotationally symmetric optics with high surface and form quality. Based on the existing fast-tool-servo system a new hybrid fast-tool-servo system with two mechanically coupled actuators was designed: a piezo system with a stroke of 40 micron at 1000 Hz and a linear motor with a stroke of 2 mm at 40 Hz. This paper gives a detailed technical description of the new system as well as examples of diamond turned nrs laser optics machined with the hybrid fast-tool-servo system.