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Nb2O5 and TiO2 thin films deposited by pulse magnetron sputtering of cylindrical ceramic targets
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2012
Conference Paper
Title
Nb2O5 and TiO2 thin films deposited by pulse magnetron sputtering of cylindrical ceramic targets
Author(s)
Preußner, T.
Blüthner, R.
Kopte, T.
Mainwork
ICCG 2012, Proceedings 9th International Conference on Coatings on Glass and Plastics
Conference
International Conference on Coatings on Glass and Plastics (ICCG) 2012
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
Keyword(s)
magnetron sputtering
ceramic targets
