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Influence of different types of magnetic fields on the interface shape in a 200 mm Si-EMCZ configuration
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2007
Conference Paper
Title
Influence of different types of magnetic fields on the interface shape in a 200 mm Si-EMCZ configuration
Author(s)
Vizman, D.
Watanabe, M.
Friedrich, J.
Müller, G.
Mainwork
Fifth International Workshop on Modeling in Crystal Growth, IWMCG 2006. Proceedings
Conference
International Workshop on Modeling in Crystal Growth (IWMCG) 2006
DOI
10.1016/j.jcrysgro.2006.11.347
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
