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Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity
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1992
Journal Article
Title
Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity
Author(s)
Fuhr, G.
Hagedorn, R.
Müller, T.
Benecke, W.
Wagner, B.
Journal
Journal of Microelectromechanical Systems
DOI
10.1109/84.186393
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
