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  4. Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile
 
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2014
Conference Paper
Title

Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile

Abstract
A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.
Author(s)
Fell, Andreas  
Hopman, Sybille
Vago, N.
Kluska, Sven  
Franklin, E.
Weber, Klaus J.
Mainwork
Optics for solar energy 2014  
Conference
Conference "Optics for Solar Energy" (OSE) 2014  
Conference "Light, Energy and the Environment" 2014  
DOI
10.1364/OSE.2014.RW4B.5
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
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