Light management of aluminum doped zinc oxide thin films by fabricating periodic surface textures using direct laser interference patterning

Large area micro and sub-micrometer structuring of TCO thin film layers is performed using a laser based one-step procedure. The fabricated hexagonal arranged surface patterns with 800 nm spatial period show a higher performance in both transparency and diffraction properties compared to line-like textured and non-patterned substrates. Furthermore, non-significant variations of the electrical resistance are observed after the laser treatment.