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A frequency-selective, piezoresistive silicon vibration sensor
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1985
Conference Paper
Title
A frequency-selective, piezoresistive silicon vibration sensor
Author(s)
Csepregi, L.
Heuberger, A.
Kuehl, K.
Seidel, H.
Benecke, W.
Mainwork
Transducers '85. 3rd International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Conference
International Conference on Solid-State Sensors and Actuators 1985
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
