2003
Conference Paper
Title

Application of low temperature direct bonding in optical devices and integrated systems

Author(s)
Hiller, Karla  
Kurth, Steffen  
Neumann, N.
Hahn, R.
Kaufmann, C.
Hanf, M.
Heinz, S.
Geßner, Thomas  
Dötzel, W.
Ebest, G.
Mainwork
Conference
Language
English