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Application of low temperature direct bonding in optical devices and integrated systems
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2003
Conference Paper
Title
Application of low temperature direct bonding in optical devices and integrated systems
Author(s)
Hiller, Karla
Kurth, Steffen
Neumann, N.
Hahn, R.
Kaufmann, C.
Hanf, M.
Heinz, S.
Geßner, Thomas
Dötzel, W.
Ebest, G.
Mainwork
Micro System Technologies 2003
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2003
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
