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Layer-by-layer interference lithography of three-dimensional microstructures in SU-8
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2009
Journal Article
Title
Layer-by-layer interference lithography of three-dimensional microstructures in SU-8
Author(s)
Lasagni, A.F.
Yuan, D.J.
Das, S.
Journal
Advanced engineering materials
DOI
10.1002/adem.200800382
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
