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On line control of transparent inorganic layers deposited on polymeric substrate by phase modulated spectroscopic ellipsometry
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2006
Doctoral Thesis
Title
On line control of transparent inorganic layers deposited on polymeric substrate by phase modulated spectroscopic ellipsometry
Thesis Note
München, TU, Diss., 2006
Author(s)
Vaskova, L.
Publishing Place
München
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Link
Language
English
Fraunhofer-Institut für Verfahrenstechnik und Verpackung IVV