2005
Poster
Title

Chemistry of mixed ligand all nitrogen coordinated Ta, Hf, and W precursors for metal nitride MOCVD

Title Supplement
Poster at Fifteenth European Conference on Chemical Vapor Deposition (EUROCVD-15), September 4-9 2005, Bochum
Author(s)
Baunemann, A.
Rische, D.
Kim, Y.
Parala, H.
Bauer, A.J.
Lemberger, M.
Fischer, R.A.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English