Inorganic-organic hybrid polymers for information technology. From planar technology to 3D nanostructures

Inorganic-organic hybrid polymers which are suitable for optical applications, were synthesized by hydrolysis/polycondensation reactions. The material can be processed by conventional photolithography as well as by two-photon processes using ferntosecond laser pulses. The material will be briefly described and examples for 2- and 3-D lithography will be given, with particular emphasis on optical applications.