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  4. The challenge of ultra thin chip assembly
 
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2004
Conference Paper
Title

The challenge of ultra thin chip assembly

Abstract
Because of their low height, the low assembly topography and their mechanical flexibility, ultra thin chips (about 20 µm) offer a wide field of possible applications. During the last years, we have successfully investigated in production, handling and assembly processes for such thin ICs. The chip handling and assembly processes had to be adapted to the very thin material, beginning with the development of special ""Dicing by Thinning"" process. A new pick and place process using thermal releasable tapes has been developed. For the chip assembly and contacting various methods depending on the application are available. The complete process chain from wafer processing up to the assembled ultra thin IC together with some application examples is discussed.
Author(s)
Feil, M.
Adler, C.
Hemmetzberger, D.
König, M.
Bock, K.
Mainwork
54th Electronic Components & Technology Conference 2004. Proceedings. Vol.1  
Conference
Electronic Components and Technology Conference (ECTC) 2004  
DOI
10.1109/ECTC.2004.1319312
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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