2016
Conference Paper
Title

MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications

Abstract
Microspectrometers based on MEMS Fabry-Pérot interferometers as optical band-pass filters are a recently emerging solution. InfraTec is one of the leading suppliers of tunable infrared MEMS filters for gas analysis. The talk will present a brief overview of the standard MEMS tunable infrared filters and the next generation with enhanced properties.
Author(s)
Neumann, N.
Ebermann, M.
Hiller, Karla  
Seifert, Mario
Meinig, Marco  
Kurth, Steffen  
Mainwork
Conference
DOI
Language
English