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Efficient and flexible high aspect ratio micromachining for the fabrication of low-g-sensors
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2005
Conference Paper
Title
Efficient and flexible high aspect ratio micromachining for the fabrication of low-g-sensors
Title Supplement
Abstract
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Author(s)
Bertz, Andreas
Lohmann, C.
Reuter, Danny
Geßner, Thomas
Mainwork
MicroCar 2005. Micro materials, nano materials for automotives. Volume of Abstracts
Conference
Fachkongress MicroCar 2005
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
