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A new generation of filtered arc sources for ultrathin top coats on magnetic hard disks
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2004
Conference Paper
Title
A new generation of filtered arc sources for ultrathin top coats on magnetic hard disks
Author(s)
Siemroth, P.
Berthold, J.
Petereit, B.
Schneider, H.H.
Hilgers, H.
Mainwork
31th International Conference on Metallurgical Coatings and Thin Films 2004. Proceedings
Conference
International Conference on Metallurgical Coatings and Thin Films (ICMCTF) 2004
DOI
10.1016/j.surfcoat.2004.07.004
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS