A modeling approach to include mechanical microsystem components into the system simulation

For MEMS devices modern technologies are used to integrate very complex components and subsystems closely together. Due to mixed-domain problems as well as the occuring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analysed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.