2015
Conference Paper
Title

Approaching the abbe limit in the extreme ultraviolet: Ultrafast imaging using a compact high average power high harmonic source

Abstract
We demonstrate high-resolution imaging below one wavelength in the extreme ultraviolet using high numerical aperture diffractive imaging. Our high-average power high harmonic source at 33nm wavelength provides sufficient flux for real-time imaging.
Author(s)
Zürch, M.
Rothhardt, J.
Hädrich, S.
Demmler, S.
Krebs, M.
Limpert, J.
Tünnermann, A.
Guggenmos, A.
Kleineberg, U.
Spielmann, C.
Mainwork
Conference
DOI
Language
English