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High-rate sputtering with a torus plasmatron
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1976
Conference Paper
Title
High-rate sputtering with a torus plasmatron
Other Title
Hochrate-Zerstäuben mit dem Torus-Plasmatron VI
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Author(s)
Heisig, U.
Goedicke, K.
Schiller, S.
Mainwork
Symposium on Electron and Ion Beam Science and Technology 1976. Proceedings
Conference
Symposium on Electron and Ion Beam Science and Technology 1976
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
