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  4. Survey on electrostatic susceptibility of integrated circuits
 
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1994
Conference Paper
Title

Survey on electrostatic susceptibility of integrated circuits

Abstract
From traditional assumptions and simplifications, different attitudes towards electrostatic discharges (ESD) in present microelectronics have been developed. The central question remains, which level of ESD-susceptibility and which level of costly external protection measures is needed to limit yield losses and potential reliability risks for integrated circuits. This paper addresses influences, links and current trends in protection design and ESD-test in the context of ESDsusceptibility of integrated circuits. One focus will be the Charged Device Model (CDM).
Author(s)
Gieser, H.
Ruge, I.
Mainwork
ESREF '94. Proceedings of the European Symposium on Reliability of Electron Devices, Failure Physics and Analysis  
Conference
European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF) 1994  
Language
English
IFT  
Keyword(s)
  • CDM

  • ESD

  • ESD failure mechanism

  • ESD-susceptibility

  • failure criteria

  • HBM

  • metrology

  • MM

  • protection scheme

  • stress model

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