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Line shape measurements in CF4/O2 and SF6 of discharges
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1993
Conference Paper
Title
Line shape measurements in CF4/O2 and SF6 of discharges
Author(s)
Heinrich, F.
Mainwork
21st International Conference on Phenomena in Ionized Gases '93. Vol.3. Proceedings
Conference
International Conference on Phenomena in Ionized Gases 1993
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
