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Hermeticity Tests
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2015
Book Article
Title
Hermeticity Tests
Title Supplement
Chapter 40
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Author(s)
Lohfink, F.
Kähler, D.
Reinert, W.
Mainwork
Handbook of Silicon Based MEMS Materials and Technologies
DOI
10.1016/B978-0-323-29965-7.00040-3
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
