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2015
Presentation
Title
Quality control of SiC materials by optical detection of defects
Title Supplement
Presentation held at Aixtron user meeting at ICSCRM 2015, Giardini Naxos, Italy, October, 4th - 9th, 2015
Other Title
Qualitätskontrollmessungen an SiC-Material durch optische Detektion der Defekte
Author(s)
File(s)
Rights
Under Copyright
Language
English