2002
Conference Paper
Title

Resistless patterning of magnetic storage media using ion projection structuring

Author(s)
Dietzel, A.
Berger, R.
Grimm, H.
Schug, C.
Brünger, W.H.
Dzionk, C.
Letzkus, F.
Springer, R.
Löschner, H.
Platzgummer, E.
Stengl, G.
Anders, S.
Bandic, Z.Z.
Rettner, C.T.
Terris, B.D.
Eichhorn, H.
Böhm, M.
Adam, D.
Mainwork
Conference
Language
English